Isbn: 9780841228481 - intro microlith 2ed acspr c (acs professional reference book) (5 Ergebnisse)

Hardcover. Zustand: Very Good. No Jacket. May have limited writing in cover pages. Pages are unmarked. ~ ThriftBooks: Read More, Spend Less.

Hardcover. Zustand: Very Good. No Jacket. May have limited writing in cover pages. Pages are unmarked. ~ ThriftBooks: Read More, Spend Less.

Zustand: New. In English.

Gebunden. Zustand: New. Reviews the theory, materials and processes that are used in the lithographic process. It opens with a brief historical introduction to microlithography, and then discusses four major topics - the physics of the lithographic process, organic resist material.

Buch. Zustand: Neu. Neuware - Updated and expanded! Reviews the theory, materials, and processes that are used in the lithographic process. Opens with a brief historical introduction to the advances in microlithography. Discusses four major topics: the physics of the lithographic process, organic resist materials, resist processing, and plasma etching. Designed as a tutorial for researchers with no experience in the field, as well as those experienced in microlithography. Will also proveinvaluable to those already involved in microlithography. Includes numerous references for more detailed reading on specific aspects of microlithography.…