INTRO MICROLITH 2ED ACSPR C (Acs Professional Reference Book) - Hardcover

Thompson

 
9780841228481: INTRO MICROLITH 2ED ACSPR C (Acs Professional Reference Book)
Hardcover
ISBN 10: 0841228485 ISBN 13: 9780841228481
Verlag: American Chemical Society, 1994

Inhaltsangabe

Updated and expanded! Reviews the theory, materials, and processes that are used in the lithographic process. Opens with a brief historical introduction to the advances in microlithography. Discusses four major topics: the physics of the lithographic process, organic resist materials, resist processing, and plasma etching. Designed as a tutorial for researchers with no experience in the field, as well as those experienced in microlithography. Will also prove invaluable to those already involved in microlithography. Includes numerous references for more detailed reading on specific aspects of microlithography.

Die Inhaltsangabe kann sich auf eine andere Ausgabe dieses Titels beziehen.

Verlag
American Chemical Society
Erscheinungsdatum
1994
Sprache
Englisch
ISBN 10 
0841228485
ISBN 13 
9780841228481
Einband
Gebundene Ausgabe
Auflage
2
Anzahl der Seiten
546
Kontakt zum Hersteller
Nicht verfügbar
Verantwortliche Person
gpsr@libri.de
gpsr@libri.de

Friedensallee 273
Hamburg
22763
Deutschland