Inhaltsangabe
Updated and expanded! Reviews the theory, materials, and processes that are used in the lithographic process. Opens with a brief historical introduction to the advances in microlithography. Discusses four major topics: the physics of the lithographic process, organic resist materials, resist processing, and plasma etching. Designed as a tutorial for researchers with no experience in the field, as well as those experienced in microlithography. Will also prove invaluable to those already involved in microlithography. Includes numerous references for more detailed reading on specific aspects of microlithography.
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Updated and expanded! Reviews the theory, materials, and processes that are used in the lithographic process. Opens with a brief historical introduction to the advances in microlithography. Discusses four major topics: the physics of the lithographic process, organic resist materials, resist processing, and plasma etching. Designed as a tutorial for researchers with no experience in the field, as well as those experienced in microlithography. Will also prove invaluable to those already involved in microlithography. Includes numerous references for more detailed reading on specific aspects of microlithography.
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Suchergebnisse für INTRO MICROLITH 2ED ACSPR C (ACS Professional Reference...
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Introduction to Microlithography (ACS Professional Reference Book)
Verlag:
American Chemical Society (edition 2), 1994
ISBN 10: 0841228485
ISBN 13: 9780841228481
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Hardcover. Zustand: Good. 2. It's a preowned item in good condition and includes all the pages. It may have some general signs of wear and tear, such as markings, highlighting, slight damage to the cover, minimal wear to the binding, etc., but they will not affect the overall reading experience. Artikel-Nr. 0841228485-11-1
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Intro Microlith 2ed Acspr C
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Hardcover. Zustand: Very Good. No Jacket. May have limited writing in cover pages. Pages are unmarked. ~ ThriftBooks: Read More, Spend Less. Artikel-Nr. G0841228485I4N00
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Intro Microlith 2ed Acspr C
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Hardcover. Zustand: Good. No Jacket. Pages can have notes/highlighting. Spine may show signs of wear. ~ ThriftBooks: Read More, Spend Less. Artikel-Nr. G0841228485I3N00
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Introduction to Microlithography (Acs Professional Reference Books)
Verlag:
American Chemical Society, 1994
ISBN 10: 0841228485
ISBN 13: 9780841228481
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Hardcover
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Introduction to Microlithography
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Zustand: Neu. Neu Neuware, Importqualität, Versand Büchersendung - Reviews the theory, materials and processes that are used in the lithographic process. It opens with a brief historical introduction to microlithography, and then discusses four major topics - the physics of the lithographic process, organic resist materials, resist processing and plasm etching.<. Artikel-Nr. INF1000072502
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