ISBN: 9787810771832 - micro-mechanical and electronic systems and their applications(chinese edition) (1 Ergebnisse)

paperback. Zustand: New. Language:Chinese.Pages Number : 192 Publisher: Beijing Aerospace University Press Pub. Date :2003-03. comprehensive book on the current published a large number of micro-electromechanical systems (MEMS) technology literature and our research results in recent years. focuses on today s micro- electromechanical system content. application and development. Including the composition of micro-electromechanical systems and applications. MEMS functional materials. micro-manufacturing technology. mic.…