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Language:Chinese.No Binding.publisher:Beijing Aerospace University Press Pub. Date :2003.description:Pages Number : 192 Publisher: Beijing Aerospace University Press Pub. Date :2003-03. comprehensive book on the current published a large number of micro-electromechanical systems (MEMS) technology literature and our research results in recent years.
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micro-mechanical and electronic systems and their applications(Chinese Edition)
Verlag:
Beijing Aerospace University Press, 2000
ISBN 10: 7810771833
ISBN 13: 9787810771832
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paperback. Zustand: New. Language:Chinese.Pages Number : 192 Publisher: Beijing Aerospace University Press Pub. Date :2003-03. comprehensive book on the current published a large number of micro-electromechanical systems (MEMS) technology literature and our research results in recent years. focuses on today s micro- electromechanical system content. application and development. Including the composition of micro-electromechanical systems and applications. MEMS functional materials. micro-manufacturing technology. mic. Artikel-Nr. J52796
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