9783319939247 - metal impurities in silicon- and germanium-based technologies: origin, characterization, control, and device impact (springer series in materials science, 270, band 270) von claeys, cor; simoen, eddy (3 Ergebnisse)

Buch. Zustand: Neu. Druck auf Anfrage Neuware - Printed after ordering - This book provides a unique review of various aspects of metallic contamination in Si and Ge-based semiconductors. It discusses all of the important metals including their origin during crystal and/or device manufacturing, their fundamental properties, thei…