Etching in Microsystem Technology - Hardcover

Microcomponents and microdevices are finding more and more applications in everyday life. Normally they are produced by lithographic etching processes. Hence these processes occupy a key position in microfabrication. This book explains the scientific fundamentals of etching processes. Furthermore it is a practical guide, offering practical advice on many etching processes to help produce perfect microstructures.

Michael Köhler Etching in Microsystem Technolgy Microcomponents and microdevices are increasingly finding application in everyday life. The specific functions of all modern micro-devices depend strongly on the selection and combination of the materials used in their construction, i.e., the chemical and physical solid-state properties of these materials, and their treatment. The precise patterning of various materials, which is normally performed by lithographic etching processes, is a prerequisite for the fabrication of microdevices. The microtechnical etching of functional patterns is a multidisciplinary area, the basis for the etching processes coming from chemistry, physics, and engineering. The book is divided into two sections: the wet and dry etching processes are presented in the first, general, section, which provides the scientific fundamentals, while a catalog of etching bath compositions, etching instructions, and parameters can be found in the second section. This section will enhance the comprehension of the general section and also give an overview of data that are essential in practice.