Ultrathin SiO2 and High-K Materials for ULSI Gate Dielectrics: Symposium Held April 5-8, 1999 San Francisco, California, U.S.A. (Materials Research Society Symposium Proceedings, Band 567) - Hardcover

Edited By H. R. Huff , C. A. Richter , M. L. Green , G. Lucovsky , T. Hattori

 
9781558994744: Ultrathin SiO2 and High-K Materials for ULSI Gate Dielectrics: Symposium Held April 5-8, 1999 San Francisco, California, U.S.A. (Materials Research Society Symposium Proceedings, Band 567)

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