9781558994744 - ultrathin sio2 and high-k materials for ulsi gate dielectrics: symposium held april 5-8, 1999 san francisco, california, u.s.a. (materials research society symposium proceedings, band 567) von edited by h. r. huff , c. a. richter , m. l. green , g. lucovsky , t. hattori (1 Ergebnisse)