Integration of Functional Oxides with Semiconductors - Softcover

Inhaltsangabe

Introduction.- Critical issues in Oxide-Semiconductor Heteroepitaxy.- Predictive Engineering of Semiconductor-Oxide Interfaces.- Crystalline Functional Oxide Growth Methods.- Thin Oxide Film Characterization Methods.- Growing SrTiO₃ on Si (001) by Molecular Beam Epitaxy.- Integration of Functional Oxides on SrTiO3/Si Pseudo-Substrates.- Other Epitaxial Oxides on Semiconductors.- Outlook and Parting Thoughts.- Appendices.

Die Inhaltsangabe kann sich auf eine andere Ausgabe dieses Titels beziehen.