Metallization: Theory and Practice for Vlsi and Ulsi: Theory and Practice of VLSI and ULSI - Hardcover

Inhaltsangabe

A synthesis of recent research and experience regarding the various metallization schemes used in electronic circuits for such purposes as controlling device properties, and providing power and interconnections with other devices or the outside world. Focuses on new but established practices in the microelectronics industry, where the new submicron dimensions and increasingly faster devices in the semiconductor are making metallization researchers work hard to keep up. Also lists the properties of useful metals and alloys. Annotation copyright Book News, Inc. Portland, Or.

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