A firm, square hardback with strong joints, just very slightly rubbed. Hence a non-text page is stamped 'damaged'. Despite such this book is actually in nearly new condition. Thus the contents are crisp, fresh and tight. Looks and feels unread. Now offered for sale at a special bargain price.

Bestandsnummer des Verk�ufers 123379

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Bibliografische Details

Titel

Chemical-Mechanical Polishing 2000 - Fundamentals and Materials Issues: Volume 613 (MRS Proceedings)

Verlag

Cambridge University Press

Erscheinungsjahr

2001

Sprache

Englisch

ISBN-10

1558995218

ISBN-13

9781558995215

Einband

Hardcover

Auflage

First Edition.

Zustand

Like New

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Inhaltsangabe

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

Rese�a del editor

Chemical-mechanical polishing (CMP) is a critical technology in the planarization of multilevel metallization systems and shallow-trench isolation in semiconductor manufacturing. Other emerging applications for this technology include flat-panel displays, magnetic data storage and microelectromechanical systems. The rapid emergence of copper as the conducting material for integrated circuits has further pushed CMP technology to the forefront of semiconductor manufacturing. However, a basic understanding of the CMP process, which is necessary to enable further advances, is inadequate. This book, first published in 2001, provides an insight into the fundamental processes in CMP. Presentations from academia, government institutions and industry are featured. Topics include: CMP mechanisms; dielectric and metal CMP; process integration and manufacturability; and CMP consumables.

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Unternehmensdaten des Verk�ufers

Prior Books Ltd
Unit 42, Space Business Centre, Cheltenham, GL51 9FL, United Kingdom

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Prior Books Limited, Unit 42, Space Business Centre, Tewkesbury Road, Cheltenham, GL51 9FL, United Kingdom. Phone 01242 227141. Contact: Brecken McPhee. Email: priorbooks@gmail.com. Company Registration Number: 7981438. Vat Number: 79125361.
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