9789819547579 - micro-nano manufacturing and micro-electro-mechanical systems von li, jingmin; liu, chong; wang, liding (2 Ergebnisse)
- Hardcover
Anbieter: Revaluation Books, Exeter, , Vereinigtes KönigreichRevaluation Books
Verkäufer/-in kontaktierenVerkäufer/-in mit 5 SternenZustand: Neu
EUR 144,06
EUR 14,40 VersandVersand von Vereinigtes Königreich nach USAAnzahl: 1 verfügbar
Hardcover. Zustand: Brand New. 361 pages. 6.30x0.94x9.49 inches. In Stock.
- Hardcover
Anbieter: AHA-BUCH GmbH, Einbeck, DeutschlandAHA-BUCH GmbH
Verkäufer/-in kontaktierenVerkäufer/-in mit 5 SternenZustand: Neu
EUR 100,94
EUR 63,88 VersandVersand von Deutschland nach USAAnzahl: 1 verfügbar
Buch. Zustand: Neu. Druck auf Anfrage Neuware - Printed after ordering - This book is a well-structured textbook that systematically introduces the basic concepts, process technologies, typical devices, and system applications related to micro-nano manufacturing and micro-electromechanical systems (MEMS). The book is divided int…o eight chapters, including the concept and development of MEMS, principles and application examples of bulk and surface silicon process, microfabrication technology of non-silicon materials, MEMS microsensors, MEMS microactuators, recent developments in biomedical, telecommunication, and aerospace fields. This book combines process principles and application examples with rigorous logic. It is suitable for basic learning and knowledge expansion for readers majoring in mechanical engineering, instrument science and technology, electronic science and technology, and physics.
