Isbn: 9783642055362 - modelling of microfabrication systems (microtechnology and mems) (4 Ergebnisse)

Zustand: New. In English.

Taschenbuch. Zustand: Neu. Druck auf Anfrage Neuware - Printed after ordering - This book addresses modeling of systems that are important to the fabrication of three-dimensional microstructures. Selected topics are ion beam micromachining, x-ray lithography, laser chemical vapor deposition, photopolymerization, laser ablation, and thin films. Models simulating the behavior of these systems are presented, graphically illusratted, and discussed in the light of experimental results. Knowledge gained from such models is essential for system operation and optimization. This book is unique in that it focuses on high aspect ratio microtechnology. It will be invaluable to scientists, engineers, graduate students, and manufacturers engaged in research and development for enhancing the accuracy and precision of microfabrication systems for commercial applications. …

Taschenbuch. Zustand: Neu. Modelling of Microfabrication Systems | Raja Nassar (u. a.) | Taschenbuch | x | Englisch | 2010 | Springer | EAN 9783642055362 | Verantwortliche Person für die EU: Springer Verlag GmbH, Tiergartenstr. 17, 69121 Heidelberg, juergen[dot]hartmann[at]springer[dot]com | Anbieter: preigu.…

Paperback. Zustand: Brand New. 269 pages. 9.00x6.25x0.64 inches. In Stock.