Isbn: 9781605110400 - doping engineering for front-end processing: symposium held march 25-27, 2008, san francisco, california, u.s.a (mrs proceedings, band 1070) (4 Ergebnisse)

Zustand: New. In English.

Zustand: New. The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners. Editor(s): Pawlak, B. J.; Pelaz, M. L.; Law, M.; Surugo, K. Series: MRS Proceedings. Num Pages: 319 pages, Illustrations. BIC Classification: TGM. Category: (U) Tertiary Education (US: College). Dimension: 228 x 152 x 23. Weight in Grams: 568. . 2008. Hardback. . . . . Books ship from the US and Ireland. …

Hardcover. Zustand: Brand New. 319 pages. 9.00x6.00x0.75 inches. In Stock.

Buch. Zustand: Neu. Druck auf Anfrage Neuware - Printed after ordering - Materials scientists, silicon technologists and TCAD researchers come together in this book to share experimental results and physical models, discuss achievements and challenges, and identify key issues for future research in this field. The volume focuses on many aspects related to doping of semiconductors (Si, SiGe and Ge) for device fabrication, and explores areas for single-gate as well as multi-gate devices with planar and vertical architectures. Surface properties, coverage, bonding saturation and passivation, and annealing ambient are also discussed.…