9780849386442 - radio-frequency capacitive discharges von raizer, yuri p.; shneider, mikhail n. (1 Ergebnisse)

Buch. Zustand: Neu. Neuware - Describes radio-frequency (rf) capacitive gas discharges of intermediate and low pressure and their application to gas laser excitation and to plasma processing. This work provides a treatment of the physics underlying rf discharges, techniques for generating such discharges, experimental methods an…