Optical and EUV Lithography A Modeling Perspective

Erdmann helps students science, engineering, and mathematics get started in lithographic techniques for nanofabrication. The material should also help senior engineers and managers widen their view on alternative methods and applications, he says. His focus is on the fundamental principles of image and pattern formation, rather than details of technique. His topics include image formation in project lithography, optical resolution enhancements, lithography with extreme-ultraviolet light, optical lithography beyond projection imaging, and mask and water topography effects in lithography. Annotation ©2021 Ringgold, Inc., Portland, OR (protoview.com)