Titel: MEMS and MOEMS Technology and Applications (SPIE Press Monograph Vol. PM85)
Verlag: SPIE Publications
Erscheinungsjahr: 2000
Sprache: Englisch
ISBN-10: 0819437166
ISBN-13: 9780819437167
Einband: Hardcover
Zustand: Very Good
Zustand des Schutzumschlags: No Jacket

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The silicon age that led the computer revolution has significantly changed the world. The next 30 years will see the incorporation of new types of functionality onto the chip-structures that will enable the chip to reason, to sense, to act and to communicate. Micromachining technologies offer a wide range of possibilities for active and passive devices. Recent developments have produced sensors, actuators and optical systems. Many of these technologies are based on surface micromachining, which has evolved from silicon integrated circuit technology. This book is written by experts in the field. It contains useful details in design and processing and can be utilized as a reference book or as a textbook.

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