Handbook of Silicon Semiconductor Metrology. Dieser Artikel ist nicht verfügbar.
Sprache: Englisch
Verlag: CRC Press, 2001
- Hardcover
- Neu
Anbieter: PBShop.store US, Wood Dale, IL, USAPBShop.store US
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Hardcover
Zustand: Neu
EUR 781,25
Artikelbeschreibung des Verkäufers
New Book. Shipped from UK. Established seller since 2000.
Bestandsnummer des Verkäufers L2-9780824705060
- Titel
- Handbook of Silicon Semiconductor Metrology
- Verlag
- CRC Press
- Erscheinungsjahr
- 2001
- Zustand
- New
- Einband
- HRD
- Sprache
- Englisch
- ISBN-10
- 0824705068
- ISBN-13
- 9780824705060
- Artikelgewicht
- 1.852 Gramm
Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs,
this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, critical dimension, overlay, acoustic film thickness, dopant dose, junction depth, and electrical measurements; particle and defect detection; and flatness following chemical mechanical polishing. Providing examples of well-developed metrology capability, the book focuses on metrology for lithography, transistor, capacitor, and on-chip interconnect process technologies.
this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, critical dimension, overlay, acoustic film thickness, dopant dose, junction depth, and electrical measurements; particle and defect detection; and flatness following chemical mechanical polishing. Providing examples of well-developed metrology capability, the book focuses on metrology for lithography, transistor, capacitor, and on-chip interconnect process technologies.
„Inhaltsangabe“ gehört möglicherweise zu einer anderen Auflage dieses Titels.
Über die Autorin bzw. den Autor
Alain C. Diebold
„Über diesen Titel“ gehört möglicherweise zu einer anderen Auflage dieses Titels.