Titel: Handbook of Plasma Processing Technology: Fundamental, Etching, Deposition and Surface Interactions (Materials Science and Process Technology)
Verlag: William Andrew (edition 1)
Erscheinungsjahr: 1991
Sprache: Englisch
ISBN-10: 0815512201
ISBN-13: 9780815512202
Einband: Hardcover
Auflage: 1.
Zustand: Very Good

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Inhaltsangabe

This is a comprehensive overview of the technology of plasma-based processing, written by an outstanding group of 29 contributors.

Cr�ticas

"The text provides and excellent reference for plasma processing." - SAMPE Journal

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