Titel: Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography (SPIE Press Monograph Vol. PM39)
Verlag: Society of Photo-Optical Instrumentation Engineers
Ver�ffentlichungsdatum: 1997
Sprache: Englisch
ISBN-10: 0819423785
ISBN-13: 9780819423788
Bindung: Hardcover
Zustand: Good
Zustand des Schutzumschlags: No Jacket

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Inhaltsangabe

Book by Harry J Levinson Mark A McCord Franco Cerrina Robe

Rese�a del editor

The dynamic field of lithography demands an authoritative handbook for process development and production and to aid in the training of scientists and engineers. It contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a textbook.

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