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Electron Beam Testing Technology

Thong, John T. L. (ed.)

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ISBN 10: 0306443600 / ISBN 13: 9780306443602
Verlag: Plenum Press, New York, 1993
Gebraucht Zustand: Good Hardcover
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Hardback, no jacket, printed boards. A little worn; rear board a little scratched; bumped at head and tail of spine. Leading corners show some light wear. Page block a little marked. Contents clean, sound, bright. Microdevices: Physics and Fabrication Technologies series. TPW. Buchnummer des Verkäufers 263830

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Bibliografische Details

Titel: Electron Beam Testing Technology

Verlag: Plenum Press, New York

Erscheinungsdatum: 1993

Einband: hardcover

Zustand:Good

Zustand des Schutzumschlags: No Dust Jacket

Art des Buches: Used

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Inhaltsangabe:

Although exploratory and developmental activity in electron beam testing (EBT) 25 years, it was not had already been in existence in research laboratories for over until the beginning of the 1980s that it was taken up seriously as a technique for integrated circuit (IC) testing. While ICs were being fabricated on design rules of several microns, the mechanical ne edle probe served quite adequately for internal chip probing. This scenario changed with growing device complexity and shrinking geometries, prompting IC manufacturers to take note ofthis new testing technology. It required several more years and considerable investment by electron beam tester manufacturers, however, to co me up with user-friendly automated systems that were acceptable to IC test engineers. These intervening years witnessed intense activity in the development of instrumentation, testing techniques, and system automation, as evidenced by the proliferation of technical papers presented at conferences. With the shift of interest toward applications, the technology may now be considered as having come of age.

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