Verwandte Artikel zu Lithography

Lithography - Hardcover

 
9789533070643: Lithography
Hardcover
ISBN 10: 9533070641 ISBN 13: 9789533070643
Verlag: IntechOpen, 2010

Inhaltsangabe

Lithography, the fundamental fabrication process of semiconductor devices, plays a critical role in micro- and nano-fabrications and the revolution in high density integrated circuits. This book is the result of inspirations and contributions from many researchers worldwide. Although the inclusion of the book chapters may not be a complete representation of all lithographic arts, it does represent a good collection of contributions in this field. We hope readers will enjoy reading the book as much as we have enjoyed bringing it together. We would like to thank all contributors and authors of this book.

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Verlag
IntechOpen
Erscheinungsdatum
2010
Sprache
Englisch
ISBN 10 
9533070641
ISBN 13 
9789533070643
Einband
Gebundene Ausgabe
Anzahl der Seiten
678
Herausgeber
Wang Michael
Kontakt zum Hersteller
preigu GmbH & Co. KG
mail@preigu.de

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