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Feature Profile Evolution in Plasma Processing Using On-wafer Monitoring System: Mit online files/update (SpringerBriefs in Applied Sciences and Technology) - Softcover

Samukawa, Seiji

 
9784431547945: Feature Profile Evolution in Plasma Processing Using On-wafer Monitoring System: Mit online files/update (SpringerBriefs in Applied Sciences and Technology)
Softcover
ISBN 10: 4431547940 ISBN 13: 9784431547945
Verlag: Springer, 2014

Inhaltsangabe

This book provides for the first time a good understanding of the etching profile technologies that do not disturb the plasma. Three types of sensors are introduced: on-wafer UV sensors, on-wafer charge-up sensors and on-wafer sheath-shape sensors in the plasma processing and prediction system of real etching profiles based on monitoring data. Readers are made familiar with these sensors, which can measure real plasma process surface conditions such as defect generations due to UV-irradiation, ion flight direction due to charge-up voltage in high-aspect ratio structures and ion sheath conditions at the plasma/surface interface. The plasma etching profile realistically predicted by a computer simulation based on output data from these sensors is described.

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Über die Autorin bzw. den Autor

Prof. Seiji Samukawa
Distinguished Professor in Tohoku University
Professor in Institute of Fluid Science,
Professor and Principal Investigator, WPI-AIMR in Tohoku University.

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Verlag
Springer
Erscheinungsdatum
2014
Sprache
Englisch
ISBN 10 
4431547940
ISBN 13 
9784431547945
Einband
Taschenbuch
Anzahl der Seiten
52
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