Microsystems and Nanotechnology - Softcover

Inhaltsangabe

Part 1.The Fundamentals of Microsystems and Nanotechnology.-

Information Electronics Of Nano-era.- Micro/Nano Fluidics.- Materials Problems in MEMS.- Nanomechanics in Crossed Multidiscipline.- Nano Structure and Monomolecular Electronic Transport Feature.- Nanomaterials structural Analysis and Attribute.-

Part 2.Microsystems.-

MEMS Introduction.- Micro Electromechanical Sensor.- Microactuator.- MEMS Design.- MEMS Processing and Fabrication Techniques and Technology.- Optical MEMS and Nano-Photonics.- Introduction of MEMS Packaging.-

Part 3.Nanotechnology.-

Nanotube , Nanoware , Nanobelt.- Semiconductor NanoCrystal-- Quantum Dot ,Quantum Wire, Quantum Rod.- The Application of STM and AFM in Nano Process and Fabrication.- Nanoscale Fabrication.- Integration Nanotechnology based on MEMS Manufacture Technology.-

Part 4.Microsystems and Nanotechnology Application.-

MEMS Application.- Micro-electromechanical Sensor System.- A Surface Micromachined Accelerometer with Integrated CMOS Detection Circuitry.- MEMS in Automobile.- Biochips.- Nanotechnology in Biological and Medical Applications.-

Part 5.Development and Prospect.-

Development and Prospect.

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