Design and Manufacturing of Active Microsystems (Microtechnology and MEMS) - Hardcover

 
9783642129025: Design and Manufacturing of Active Microsystems (Microtechnology and MEMS)
Hardcover
ISBN 10: 3642129021 ISBN 13: 9783642129025
Verlag: Springer, 2011

Inhaltsangabe

This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle. The travel of the investigated actuator systems is on the order of several millimeters. The total construction size of the actuator is on the range of several centimeters whereas essential structures being several micrometers. The methods and the production technologies that are investigated on the basis of various research models incorporate the fundamental process chains of microsystems.

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Von der hinteren Coverseite

This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle. The travel of the investigated actuator systems is on the order of several millimeters. The total construction size of the actuator is on the range of several centimeters whereas essential structures being several micrometers. The methods and the production technologies that are investigated on the basis of various research models incorporate the fundamental process chains of microsystems.

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Verlag
Springer
Erscheinungsdatum
2011
Sprache
Englisch
ISBN 10 
3642129021
ISBN 13 
9783642129025
Einband
Gebundene Ausgabe
Anzahl der Seiten
456
Herausgeber
Büttgenbach Stephanus, Burisch Arne, Hesselbach Jürgen
Kontakt zum Hersteller
ProductSafety@springernature.com
ProductSafety@springernature.com

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Darmstadt
64293
Deutschland

Weitere beliebte Ausgaben desselben Titels

9783642267383: Design and Manufacturing of Active Microsystems (Microtechnology and MEMS)

Vorgestellte Ausgabe

ISBN 10:  3642267386 ISBN 13:  9783642267383
Verlag: Springer, 2014
Softcover