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Microsystem Technology and Microrobotics (Microsystem Technology & Microrobotics) - Hardcover

Fatikow, Sergej; Rembold, Ulrich

 
9783540606581: Microsystem Technology and Microrobotics (Microsystem Technology & Microrobotics)
Hardcover
ISBN 10: 3540606580 ISBN 13: 9783540606581
Verlag: Springer, 1997

Inhaltsangabe

Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It is the first of its kind to cover MST in its entirety. It gives a comprehensive treatment of all important parts of MST such as microfabrication technologies, microactuators, microsensors, development and testing of microsystems, and information processing in microsystems. It surveys products built to date and experimental products and gives a comprehensive view of all developments leading to MST devices and robots.

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Über die Autorin bzw. den Autor

Dr.-Ing. Sergej Fatikow, Univeristät Gesamthochschule Kassel, Leiter des Institutes für Regelungs- und Automatisierungstechnik im Fachbereich Elektrotechnik.

Von der hinteren Coverseite

Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It is the first of its kind to cover MST in its entirety. It gives a comprehensive treatment of all important parts of MST such as microfabrication technologies, microactuators, microsensors, development and testing of microsystems, and information processing in microsystems. It surveys products built to date and experimental products and gives a comprehensive view of all developments leading to MST devices and robots. Pictures and photos ease unterstanding and a wealth of references allow further work.

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Verlag
Springer
Erscheinungsdatum
1997
Sprache
Englisch
ISBN 10 
3540606580
ISBN 13 
9783540606581
Einband
Gebundene Ausgabe
Anzahl der Seiten
420
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