Modelling of Microfabrication Systems (Microtechnology and MEMS) - Hardcover

Nassar, Raja; Dai, Weizhong

 
9783540002529: Modelling of Microfabrication Systems (Microtechnology and MEMS)
Hardcover
ISBN 10: 3540002529 ISBN 13: 9783540002529
Verlag: Springer, 2003

Inhaltsangabe

This is the first book to address modelling of systems that are important to the fabrication of three-dimensional microstructures. It is unique in that it focuses on high aspect ratio microtechnology, ranging from ion beam micromachining to x-ray lithography.

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Von der hinteren Coverseite

This book addresses modeling of systems that are important to the fabrication of three-dimensional microstructures. Selected topics are ion beam micromachining, x-ray lithography, laser chemical vapor deposition, photopolymerization, laser ablation, and thin films. Models simulating the behavior of these systems are presented, graphically illusratted, and discussed in the light of experimental results. Knowledge gained from such models is essential for system operation and optimization. This book is unique in that it focuses on high aspect ratio microtechnology. It will be invaluable to scientists, engineers, graduate students, and manufacturers engaged in research and development for enhancing the accuracy and precision of microfabrication systems for commercial applications.

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Verlag
Springer
Erscheinungsdatum
2003
Sprache
Englisch
ISBN 10 
3540002529
ISBN 13 
9783540002529
Einband
Gebundene Ausgabe
Anzahl der Seiten
280
Kontakt zum Hersteller
ProductSafety@springernature.com
ProductSafety@springernature.com

Poststr. 9
Darmstadt
64293
Deutschland

Weitere beliebte Ausgaben desselben Titels

9783642055362: Modelling of Microfabrication Systems (Microtechnology and MEMS)

Vorgestellte Ausgabe

ISBN 10:  3642055362 ISBN 13:  9783642055362
Verlag: Springer, 2010
Softcover