Reliability of MEMS: Testing of Materials and Devices (Advanced Micro and Nanosystems) - Hardcover

9783527314942: Reliability of MEMS: Testing of Materials and Devices (Advanced Micro and Nanosystems)

Hardcover

ISBN 10: 3527314946 ISBN 13: 9783527314942

Verlag: Wiley-VCH Verlag GmbH, 2007

THIS FIRST BOOK TO COVER EXCLUSIVELY AND IN DETAIL THE PRINCIPLES, TOOLS AND METHODS FOR DETERMINING THE RELIABILITY OF MICROELECTROMECHANICAL MATERIALS, COMPONENTS AND DEVICES COVERS BOTH COMPONENT MATERIALS AS WELL AS ENTIRE MEMS DEVICES. DIVIDED INTO TWO MAJOR PARTS, FOLLOWING A GENERAL INTRODUCTORY CHAPTER TO RELIABILITY ISSUES, THE FIRST PART LOOKS AT THE MECHANICAL PROPERTIES OF THE MATERIALS USED IN MEMS, EXPLAINING IN DETAIL THE NECESSARY MEASURING TECHNOLOGIES –– NANOINDENTERS, BULGE METHODS, BENDING TESTS, TENSILE TESTS, AND OTHERS. PART TWO TREATS THE ACTUAL DEVICES, ORGANIZED BY IMPORTANT DEVICE CATEGORIES SUCH AS PRESSURE SENSORS, INERTIAL SENSORS, RF MEMS, AND OPTICAL MEMS.

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Cr�ticas

"The book will undoubtedly be of interest to MEMS practitioners and researchers." ( Journal of Applied Electrochemistry , February 2008)

Rese�a del editor

This first book to cover exclusively and in detail the principles, tools and methods for determining the reliability of microelectromechanical materials, components and devices covers both component materials as well as entire MEMS devices. Divided into two major parts, following a general introductory chapter to reliability issues, the first part looks at the mechanical properties of the materials used in MEMS, explaining in detail the necessary measuring technologies -- nanoindenters, bulge methods, bending tests, tensile tests, and others. Part Two treats the actual devices, organized by important device categories such as pressure sensors, inertial sensors, RF MEMS, and optical MEMS.

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