Micro Electro Mechanical Systems (MEMS) (2nd Edition) (Book with DVD) - Softcover

Inhaltsangabe

Microelectromechanical systems (MEMS) are a groundbreaking field that adapts for new uses a technology already optimized to accomplish a specific set of objectives. Focuses on the fundamentals of nano- and microengineering and nano- and microtechnology. Describes the principles of MEMS through an integrated approach and closed-form solutions to micromechanical problems, which have been recently developed by the author and go beyond what is available in other texts.

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