Verwandte Artikel zu Handbook of Semiconductor Interconnection Technology

Handbook of Semiconductor Interconnection Technology - Hardcover

 
9781574446746: Handbook of Semiconductor Interconnection Technology
Hardcover
ISBN 10: 1574446746 ISBN 13: 9781574446746
Verlag: CRC Press Inc, 2006

Inhaltsangabe

First introduced about a decade ago, the first edition of the Handbook of Semiconductor Interconnection Technology became widely popular for its thorough, integrated treatment of interconnect technologies and its forward-looking perspective. The field has grown tremendously in the interim and many of the "likely directions" outlined in the first edition are now standard in modern facilities. Reflecting those advances, this edition delves into the practical aspects of interconnections for manufacturing. It examines the interconnect and fabrication technologies now available, with an examination of future prospects for the field.

What's in this Edition:

  • Detailed discussion of electrochemical equipment for plating copper
  • Information on tools used for evaporation, chemical vapor deposition, and plasma processes
  • Emphasis on measurement of mechanical and thermal properties of insulators
  • Methods for characterizing porous dielectric thin films
  • Greater focus on integration issues and properties of titanium, cobalt, and nickel silicides
  • Process schemes based on the increased need for borderless contact gates and source/drain
  • Expanded discussion on choices for low-dielectric insulators
  • Concentration on electroplated copper, especially morphology of plated films and their properties
  • Developments in thin film liners and barriers
  • Expanded material on copper reliability

    • Die Inhaltsangabe kann sich auf eine andere Ausgabe dieses Titels beziehen.

    Über die Autorin bzw. den Autor

    Geraldine C. Schwartz, Geraldine Cogin Shwartz, Kris V. Srikrishnan

    „Über diesen Titel“ kann sich auf eine andere Ausgabe dieses Titels beziehen.

    Verlag
    CRC Press Inc
    Erscheinungsdatum
    2006
    Sprache
    Englisch
    ISBN 10 
    1574446746
    ISBN 13 
    9781574446746
    Einband
    Gebundene Ausgabe
    Auflage
    2
    Anzahl der Seiten
    520
    Herausgeber
    Schwartz Geraldine Cogin, Srikrishnan Kris V.
    Kontakt zum Hersteller
    Nicht verfügbar
    Verantwortliche Person
    Taylor & Francis Verlag GmbH
    GPSR@taylorandfrancis.com

    Kaufingerstraße 24, 80331 München, Germany
    München
    Deutschland