Characterization and Metrology for ULSI Technology: 1998 International Conference, 23-27 March 1998: National Institute of Standards and Technology, ... MD, USA: v.449 (AIP Conference Proceedings) - Hardcover

 
9781563967535: Characterization and Metrology for ULSI Technology: 1998 International Conference, 23-27 March 1998: National Institute of Standards and Technology, ... MD, USA: v.449 (AIP Conference Proceedings)
Hardcover
ISBN 10: 1563967537 ISBN 13: 9781563967535
Verlag: American Institute of Physics, 1998

Inhaltsangabe

The proceedings of the 1998 International Conference on Characterization and Metrology for ULSI Technology was dedicated to summarizing major issues and giving critical reviews of important semiconductor techniques that are crucial to continue the advances in semiconductor technology. Characterization and metrology are key enablers for developing semiconductor process technology and in improving manufacturing. This is the only book that we know of that emphasizes the science and technology of semiconductor characterization in the factory environment. The increasing importance of monitoring and controlling semiconductor processes make it particularly timely.

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Reseña del editor

The proceedings of the 1998 International Conference on Characterization and Metrology for ULSI Technology was dedicated to summarizing major issues and giving critical reviews of important semiconductor techniques that are crucial to continue the advances in semiconductor technology. Characterization and metrology are key enablers for developing semiconductor process technology and in improving manufacturing. This is the only book that we know of that emphasizes the science and technology of semiconductor characterization in the factory environment. The increasing importance of monitoring and controlling semiconductor processes make it particularly timely.

„Über diesen Titel“ kann sich auf eine andere Ausgabe dieses Titels beziehen.

Verlag
American Institute of Physics
Erscheinungsdatum
1998
Sprache
Englisch
ISBN 10 
1563967537
ISBN 13 
9781563967535
Einband
Tapa dura
Anzahl der Seiten
1025
Herausgeber
Seiler David G., Diebold A.C., Bullis W.M., Shaffner T. J., McDonald R., Walters E.J.
Kontakt zum Hersteller
Nicht verfügbar
Verantwortliche Person
Nicht verfügbar

Weitere beliebte Ausgaben desselben Titels

9781563968679: Characterization and Metrology for ULSI Technology: 1998 International Conference, 23-27 March 1998: National Institute of Standards and Technology, Gaithersburg MD, USA

Vorgestellte Ausgabe

ISBN 10:  1563968673 ISBN 13:  9781563968679
Verlag: American Institute of Physics, 1998
Hardcover