Advanced Metallization and Interconnect Systems for ULSI Applications in 1995: Volume 11 (MRS Conference Proceedings) - Hardcover

9781558993419: Advanced Metallization and Interconnect Systems for ULSI Applications in 1995: Volume 11 (MRS Conference Proceedings)

Hardcover

ISBN 10: 155899341X ISBN 13: 9781558993419

Verlag: Materials Research Society, 2000

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

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Rese�a del editor

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

Rese�a del editor

This volume is the 12th in a successful series previously known as Advanced Metallization for ULSI Applications. The addition of Interconnect Systems to the conference name is indicative of the growth and venue of topics which have been incorporated into the conference over the past several years. The volume features a keynote address on "Process Technologies for High-Performance Multilevel Metallization Schemes" and a special section on low-k dielectric materials and systems.

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