Verwandte Artikel zu Principles of Lithography (Press Monographs)

Principles of Lithography (Press Monographs) - Hardcover

Levinson, Harry J.

 
9781510627604: Principles of Lithography (Press Monographs)
Hardcover
ISBN 10: 151062760X ISBN 13: 9781510627604
Verlag: SPIE Press, 2019

Inhaltsangabe

"This text is intended to serve as an introduction to the science of microlithography, but also covers several subjects in depth, making it useful to the experienced lithographer as well. Topics directly related to manufacturing tools are addressed, including overlay, the stages of exposure, tools, and light sources. This updated edition reflects recent advances in technology, including the shift of immersion lithography from development into volume manufacturing, and the movement of EUV lithography fromthe lab to development pilot lines. New references and homework problems are included. It is expected that the reader of this book will have a foundation in basic physics and chemistry. No topics will require knowledge of mathematics beyond elementary calculus"--

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Verlag
SPIE Press
Erscheinungsdatum
2019
Sprache
Englisch
ISBN 10 
151062760X
ISBN 13 
9781510627604
Einband
Gebundene Ausgabe
Auflage
4
Anzahl der Seiten
630
Kontakt zum Hersteller
Nicht verfügbar
Verantwortliche Person
Mare Nostrum Group B.V.
gpsr@mare-nostrum.co.uk

Doelen 72
Breda
4831 GR
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