Helium Ion Microscopy: Principles and Applications - Softcover

Inhaltsangabe

Chapter 1: Introduction to Helium Ion Microscopy
Chapter 2: Microscopy with Ions - A brief history
Chapter 3: Operating the Helium Ion Microscope
Chapter 4: Ion -Solid Interactions and Image Formation
Chapter 5: Charging and Damage
Chapter 6: Microanalysis with the HIM
Chapter 7: Ion Generated Damage
Chapter 8: Working with other Ion beams
Chapter 9: Patterning and Nanofabrication
Conclusion
Bibliography
Appendix: iSE Yields, and IONiSE parameters for He+ excitation of Elements and Compounds
Index

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