Advanced Mechatronics and MEMS Devices - Softcover

Inhaltsangabe

Development of a Silicon Based MEMS6-DoF-Force/Torque-Sensor.- Piezoelectrically Actuated Robotic End-effector with Strain Amplification Mechanisms.- Autocalibration of MEMS Accelerometers.- Miniaturization of Micromanipulation Tools.- Digital Microrobotics Using MEMS Technology.- Flexure-based Parallel-Kinematics Stages for Passive Assembly of MEMS Optical Switches.- Micro-Tactile Sensors for Measurement of In-Vivo Young's Modulus and Shear Modulus of Elasticity.- Devices and techniques for micro-gripping.- A Wall-climbing Robot with Biomimetic Adhesive Pedrail.- Development of Bio-inspired Artificial Sensory Cilia.- Jumping Like an Insect: from Bio-mimetic Inspiration to a Jumping Mini Robot Design.- Modeling and H∞ PID Plus Feedforward Controller Design for an Electrohydraulic Actuator (EHA) System.

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