Handbook of Microlithography, Micromachining, and Microfabrication: v.1 & 2 (IEE Materials & Devices S.) - Hardcover

Reseña del editor

Lithography is the key technology that has enabled the dynamic growth of the integrated circuit industry over the past two decades. With the continuing demand for technological development, lithography remains at the frontier of high technology. This authoritative handbook provides a comprehensive resource for process development and training, in both the microelectronics device manufacturing field and newer application areas, such as sensors, actuators and biomedical devices. The handbook is written by leading experts in the field, and may be used as a reference or text by researchers and engineers who are not expert in the area as well as a good reference for those who are. Volume 2 of the Handbook focuses on the process technology and the numerous device applications using Micromachining and microfabrication. This handbook will be useful to researchers and engineers who are not yet specilists in the field and will serve as a reference book for experts. The material is presented in such a manner as to allow the book to be utilised as a comprehensive reference book. This Handbook is intended for use primarily in industrial laboratories, universities, libraries and manufacturing facilities.