Fundamentals of Microfabrication: The Science of Miniaturization, Second Edition - Hardcover

Madou, Marc J.

 
9780849308260: Fundamentals of Microfabrication: The Science of Miniaturization, Second Edition
Hardcover
ISBN 10: 0849308267 ISBN 13: 9780849308260
Verlag: CRC Press, 2002

Inhaltsangabe

MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the technologies and techniques needed to fabricate the increasingly miniature devices that are literally changing our world.

A bestseller in its first edition, Fundamentals of Microfabrication, Second Edition reflects the many developments in methods, materials, and applications that have emerged recently. Renowned author Marc Madou has added exercise sets to each chapter, thus answering the need for a textbook in this field.

Fundamentals of Microfabrication, Second Edition offers unique, in-depth coverage of the science of miniaturization, its methods, and materials. From the fundamentals of lithography through bonding and packaging to quantum structures and molecular engineering, it provides the background, tools, and directions you need to confidently choose fabrication methods and materials for a particular miniaturization problem.

New in the Second Edition

  • Revised chapters that reflect the many recent advances in the field
  • Updated and enhanced discussions of topics including DNA arrays, microfluidics, micromolding techniques, and nanotechnology
  • In-depth coverage of bio-MEMs, RF-MEMs, high-temperature, and optical MEMs.
  • Many more links to the Web
  • Problem sets in each chapter

    • Die Inhaltsangabe kann sich auf eine andere Ausgabe dieses Titels beziehen.

    Críticas

    "The Fundamentals of Microfabrication describes the science of miniaturization, which demonstrates ways of making devices using smaller and smaller materials. This book brings an understanding of manufacturing options, material choices, and size...This book is well written and very informative for anyone interested in this area of engineering and could be used in an advanced course for the study of microfabrication." -Diane Kauzlarick, EET

    Reseña del editor

    MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the technologies and techniques needed to fabricate the increasingly miniature devices that are literally changing our world.

    A bestseller in its first edition, Fundamentals of Microfabrication, Second Edition reflects the many developments in methods, materials, and applications that have emerged recently. Renowned author Marc Madou has added exercise sets to each chapter, thus answering the need for a textbook in this field.

    Fundamentals of Microfabrication, Second Edition offers unique, in-depth coverage of the science of miniaturization, its methods, and materials. From the fundamentals of lithography through bonding and packaging to quantum structures and molecular engineering, it provides the background, tools, and directions you need to confidently choose fabrication methods and materials for a particular miniaturization problem.

    New in the Second Edition

  • Revised chapters that reflect the many recent advances in the field
  • Updated and enhanced discussions of topics including DNA arrays, microfluidics, micromolding techniques, and nanotechnology
  • In-depth coverage of bio-MEMs, RF-MEMs, high-temperature, and optical MEMs.
  • Many more links to the Web
  • Problem sets in each chapter

    • „Über diesen Titel“ kann sich auf eine andere Ausgabe dieses Titels beziehen.

    Verlag
    CRC Press
    Erscheinungsdatum
    2002
    Sprache
    Englisch
    ISBN 10 
    0849308267
    ISBN 13 
    9780849308260
    Einband
    Tapa dura
    Auflage
    2
    Anzahl der Seiten
    752
    Kontakt zum Hersteller
    Nicht verfügbar
    Verantwortliche Person
    Nicht verfügbar