Microlithography: Science and Technology - Hardcover

 
9780824799533: Microlithography: Science and Technology
Hardcover
ISBN 10: 0824799534 ISBN 13: 9780824799533
Verlag: CRC Press, 1998

Inhaltsangabe

This self-contained text details both elementary and advanced aspects of submicron microlithography - providing a balanced treatment of theoretical and operating practices as well as complete information on current research in the field. Including discussions on electron beam, x-ray, and proximal probe techniques and enhanced with timesaving citations to key sources in the literature and more than 600 tables, equations, drawings, and photographs that clarify the material, the book covers mechanical systems, optics, excimer laser light sources, alignment techniques and analysis, resist chemistry, processing, multilayer lithography, plasma and reactive ion etching, metrology, and more.

Die Inhaltsangabe kann sich auf eine andere Ausgabe dieses Titels beziehen.

Críticas

"The editors have done an excellent job of gathering the knowledge of a number of world experts and blending it into a harmonious whole which will serve as a reference for some time to come, even in this fast-moving field." -International Journal of Electrical Engineering Education Promo Copy

Reseña del editor

This self-contained text details both elementary and advanced aspects of submicron microlithography - providing a balanced treatment of theoretical and operating practices as well as complete information on current research in the field. Including discussions on electron beam, x-ray, and proximal probe techniques and enhanced with timesaving citations to key sources in the literature and more than 600 tables, equations, drawings, and photographs that clarify the material, the book covers mechanical systems, optics, excimer laser light sources, alignment techniques and analysis, resist chemistry, processing, multilayer lithography, plasma and reactive ion etching, metrology, and more.

„Über diesen Titel“ kann sich auf eine andere Ausgabe dieses Titels beziehen.

Verlag
CRC Press
Erscheinungsdatum
1998
Sprache
Englisch
ISBN 10 
0824799534
ISBN 13 
9780824799533
Einband
Tapa dura
Auflage
1
Anzahl der Seiten
800
Herausgeber
Smith Bruce W., Suzuki Kazuaki
Kontakt zum Hersteller
Nicht verfügbar
Verantwortliche Person
Nicht verfügbar