Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology (Plastics Engineering) - Hardcover

Inhaltsangabe

"Explores the science and technology of lithographic processes and resist materials and summarizes the most recent innovations in semiconductor manufacturing. Considers future trends in lithography and resist material technology. Reviews the interaction of light, electron beams, and X-rays with resist materials."

Die Inhaltsangabe kann sich auf eine andere Ausgabe dieses Titels beziehen.