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Handbook of Plasma Processing Technology: Fundamental, Etching, Deposition and Surface Interactions (Materials Science and Process Technology) - Hardcover

Rossnagel, Stephen M.; Westwood, William D.; Cuomo, Jerome J.

 
9780815512202: Handbook of Plasma Processing Technology: Fundamental, Etching, Deposition and Surface Interactions (Materials Science and Process Technology)

Inhaltsangabe

This is a comprehensive overview of the technology of plasma-based processing, written by an outstanding group of 29 contributors.

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