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Crucial Issues in Semiconductor Materials and Processing Technologies: Proceedings of the NATO Advanced Study Institute on Semiconductor Materials and ... 1991 (NATO Science Series E:, 222, Band 222) - Hardcover

 
9780792320036: Crucial Issues in Semiconductor Materials and Processing Technologies: Proceedings of the NATO Advanced Study Institute on Semiconductor Materials and ... 1991 (NATO Science Series E:, 222, Band 222)
Hardcover
ISBN 10: 0792320034 ISBN 13: 9780792320036
Verlag: Springer, 1992

Inhaltsangabe

Semiconductors lie at the heart of some of the most important industries and technologies of the twentieth century. The complexity of silicon integrated circuits is increasing considerably because of the continuous dimensional shrinkage to improve efficiency and functionality. This evolution in design rules poses real challenges for the materials scientists and processing engineers. Materials, defects and processing now have to be understood in their totality. World experts discuss, in this volume, the crucial issues facing lithography, ion implication and plasma processing, metallization and insulating layer quality, and crystal growth. Particular emphasis is placed upon silicon, but compound semiconductors and photonic materials are also highlighted. The fundamental concepts of phase stability, interfaces and defects play a key role in understanding these crucial issues. These concepts are reviewed in a crucial fashion.

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Von der hinteren Coverseite

Semiconductors lie at the heart of some of the most important industries and technologies of the twentieth century. The complexity of silicon integrated circuits is increasing considerably because of the continuous dimensional shrinkage to improve efficiency and functionality. This evolution in design rules poses real challenges for the materials scientists and processing engineers. Materials, defects and processing now have to be understood in their totality. World experts discuss, in this volume, the crucial issues facing lithography, ion implication and plasma processing, metallization and insulating layer quality, and crystal growth. Particular emphasis is placed upon silicon, but compound semiconductors and photonic materials are also highlighted. The fundamental concepts of phase stability, interfaces and defects play a key role in understanding these crucial issues. These concepts are reviewed in a crucial fashion.

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Verlag
Springer
Erscheinungsdatum
1992
Sprache
Englisch
ISBN 10 
0792320034
ISBN 13 
9780792320036
Einband
Gebundene Ausgabe
Anzahl der Seiten
557
Herausgeber
Coffa S., Priolo F., Rimini Emanuele, Poate J.M.
Kontakt zum Hersteller
Nicht verfügbar
Verantwortliche Person
Nicht verfügbar