Obstacles to Systemic Innovation: An Illustration from Semiconductor Manufacturing Technology (Classic Reprint) - Hardcover

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Excerpt from Obstacles to Systemic Innovation: An Illustration From Semiconductor Manufacturing Technology

Fig. 2. Increasing cost of advanced semiconductor manufacturing facilities. Assuming 800 150mm wafer Starts per day (tolliver, In essence, microenvironment technology is a wafer transport and storage sys tem consisting of an integrated collection of robotics, automation techniques, tool enclosures, and wafer pods that are used to maintain the wafers in a Class 1 (i.e one 0.5},lm particle per cubic foot) ambient. Even so, it is not an especially com plex technology in the usual sense of the term. Indeed, microenvironment technol ogy is fairly straightforward in nature. It consists of nothing more than conventional manufacturing enclosures and robotics for handling and transporting wafers. The radical quality of microenvironment technology is n0t in its complexity, but in the way it alters how manufacturers must think about the wafer processing system.

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