Measurement Assurance for Dimensional Measurements on Integrated-Circuit Photomasks (Classic Reprint) - Softcover

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Excerpt from Measurement Assurance for Dimensional Measurements on Integrated-Circuit Photomasks

List OF worksheets Calculations for a line-spacing calibration curve. Calculations for a linewidth calibration curve Calculations for a pooled standard deviation Calculations for control of measurement process. Calculations for updating the calibration curve.

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