A User's Guide to Vacuum Technology - Hardcover

O'Hanlon, John F.

 
9780471812425: A User's Guide to Vacuum Technology
Hardcover
ISBN 10: 0471812420 ISBN 13: 9780471812425
Verlag: John Wiley & Sons Inc, 1989

Inhaltsangabe

This book introduces the reader to the theory and practice of modern vacuum technology, with applications. It focuses on the understanding, operation and selection of equipment for vacuum processes used in semiconductor, optical and related technologies. This second edition has new information on components, lubrication, pump fluids and other materials. Basic characteristics and operational procedures are given for each high-vacuum pumping system. The book will be of benefit to electrical and mechanical engineers and graduate students. The previous edition of this book was published in 1980.

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Reseña del editor

This book introduces the reader to the theory and practice of modern vacuum technology, with applications. It focuses on the understanding, operation and selection of equipment for vacuum processes used in semiconductor, optical and related technologies. This second edition has new information on components, lubrication, pump fluids and other materials. Basic characteristics and operational procedures are given for each high-vacuum pumping system. The book will be of benefit to electrical and mechanical engineers and graduate students. The previous edition of this book was published in 1980.

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Verlag
John Wiley & Sons Inc
Erscheinungsdatum
1989
Sprache
Englisch
ISBN 10 
0471812420
ISBN 13 
9780471812425
Einband
Tapa dura
Anzahl der Seiten
512
Kontakt zum Hersteller
Nicht verfügbar
Verantwortliche Person
Nicht verfügbar

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