Semiconductor Sensors - Hardcover

 
9780471546092: Semiconductor Sensors

Inhaltsangabe

An interdisciplinary work offering an introduction to the basic principles and operational characteristics of semiconductor sensors. Describes sensor technology, stressing bulk and surface micromachining. Considers a sensor group related to a special physical, chemical or biological input signal. The final chapter deals with integrated sensors. Each chapter includes a summary, problem sets and a discussion of future sensor trends.

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Über die Autorin bzw. den Autor

S. M. SZE, PhD, is UMC Chair Professor in the Electronics Engineering Department at the National Chiao Tung University. His previous books include Semiconductor Devices; Physics of Semiconductor Devices, Second Edition; High-Speed Semiconductor Devices; and Semiconductor Sensors, all available from Wiley.

Von der hinteren Coverseite

Semiconductor Sensors provides complete coverage of all important aspects of all modern semiconductor sensing devices. It is the only book that offers detailed coverage of the fabrication, characterization, and operational principles of the entire spectrum of devices made from silicon and other semiconductors; and it is written by world-renowned experts in the sensor field. This authoritative guide combines user-friendly organization for quick reference with a masterful pedagogical design that helps build the reader's understanding from section to section and from one chapter to the next. It begins with a discussion of semiconductor sensor classification and terminology and moves on to a broad description of semiconductor technology, emphasizing bulk and surface micromachining. Senior undergraduate and first-year graduate students will appreciate the 300 illustrations and tables that help to clarify difficult points and encourage visualization of the devices under discussion. They will also benefit from the interdisciplinary nature of the presentation, which encompasses applied physics, chemical engineering, electrical and mechanical engineering, and materials science. For engineers and scientists involved in sensor research and development or in designing sensor-dependent devices and systems, Semiconductor Sensors is the ultimate one-stop source for the latest information on existing technologies.

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