Handbook of Quality Integrated Circuit Manufacturing - Hardcover

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Here is a comprehensive practical guide to the entire wafer fabrication process from A to Z, focusing on the manufacture of high quality integrated circuits. Written by a practicing process engineer with years of experience, this book provides you with a thorough introduction to the complex field of IC manufacturing, including wafer fabrication area layout and design, yield optimization, just-in-time management systems, statistical quality control, fabrication equipment and its setup, and cleanroom techniques. In addition, it contains a wealth of information on common process problems you'll encounter: How to detect them, how to confirm them, and how to solve them. Whether you are a new engineer or technician just entering the field, a fabrication manager looking for ways to improve quality and production, an equipment manufacturer attempting to build new production gear, or someone who would just like to know more about the IC manufacturing, this is the book you're looking for.