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Electron Beam Testing Technology

Thong, John T. L. (ed.)

Verlag: Plenum Press, New York, 1993
ISBN 10: 0306443600 / ISBN 13: 9780306443602
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Titel: Electron Beam Testing Technology

Verlag: Plenum Press, New York

Erscheinungsdatum: 1993

Einband: hardcover

Zustand: Good

Zustand des Schutzumschlags: No Dust Jacket

Art des Buches: Used


Hardback, no jacket, printed boards. A little worn; rear board a little scratched; bumped at head and tail of spine. Leading corners show some light wear. Page block a little marked. Contents clean, sound, bright. Microdevices: Physics and Fabrication Technologies series. TPW. Buchnummer des Verkäufers 263830

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Inhaltsangabe: Although exploratory and developmental activity in electron beam testing (EBT) 25 years, it was not had already been in existence in research laboratories for over until the beginning of the 1980s that it was taken up seriously as a technique for integrated circuit (IC) testing. While ICs were being fabricated on design rules of several microns, the mechanical ne edle probe served quite adequately for internal chip probing. This scenario changed with growing device complexity and shrinking geometries, prompting IC manufacturers to take note ofthis new testing technology. It required several more years and considerable investment by electron beam tester manufacturers, however, to co me up with user-friendly automated systems that were acceptable to IC test engineers. These intervening years witnessed intense activity in the development of instrumentation, testing techniques, and system automation, as evidenced by the proliferation of technical papers presented at conferences. With the shift of interest toward applications, the technology may now be considered as having come of age.

Inhaltsangabe: This is the first comprehensive volume on electron beam testing for integrated circuits. Including introductory material, a guide to fundamentals, and an implementational section, the work will serve as a complete reference for both experienced practitioners as well as those unfamiliar with the technology.

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